发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the auto-doping of a P type impurity by a method wherein gallium or indium is used as the impurity for acceptor which is added into a P type semiconductor layer. CONSTITUTION:The first non-single crystal semiconductor layer wherein P type silicon, germanium or silicon carbide added with gallium or indium is the main constitutent is provided on a substrate or the electrode constituted of a conductive layer on the substrate. In this manner, the auto-doping of P type impurity into the second non-single semiconductor layer formed on this semiconductor layer can be prevented.
申请公布号 JPS58161381(A) 申请公布日期 1983.09.24
申请号 JP19820044082 申请日期 1982.03.19
申请人 HANDOUTAI ENERUGII KENKYUSHO:KK 发明人 YAMAZAKI SHIYUNPEI
分类号 H01L31/04;H01L21/20 主分类号 H01L31/04
代理机构 代理人
主权项
地址