| 摘要 |
PURPOSE:To improve a magnetic characteristic together with a mass productivity, by providing 2<= oxidizing gas lead-in ports on a vacuum tank. CONSTITUTION:In a method for diagonally vapor-depositing a magnetic metal 11 in a crucible 10 through a mask 12, shifting a base film 6 along a cooling can 8 from a wind-off shaft 7 to a wind-up shaft 9, the first lead-in port 14 which is an oxidizing gas lead-in port for a main incident angle component side, and the second lead-in port 15 which is an oxidizing gas lead-in port for a high incident angle component side are provided on a vapor-deposition device body 1, and the magnetic metal is vapor-deposited in a vacuum under leading in oxidizing gas such as oxygen, etc. from these lead-in ports. |
