| 摘要 |
PURPOSE:To control the vapor-deposition condition, by measuring an electromagnetic conversion characteristic of a vapor-deposited film by the back head system at the almost same time a vapor-deposition, also measuring the thickness of a tape, and compensating a measured electromagnetic conversion characteristic value by a measured thickness value. CONSTITUTION:Thickness of a tape fed out from a tape winding-off machine 1 is measured by a photoelectric spectro-photometer 4, etc., subsequently, to the tape fed along a drum 2, a magnetic material is vapor-deposited from a crucible 11, and after that, an electromagnetic conversion characteristic of a vapor- deposited film is measured by use of a magnetic head 5 from the back of the tape, and the tape is taken up to a tape take up machine. A value measured by the photoelectric spectro-photometer 4 and a value measured by the magnetic head 5 are sent to an interface 15 and a microcomputer 16, the measured value of the electromagnetic conversion characteristic is corrected by thickness of the base, and its result is fed back to the crucible 11 through the interface 15 and a crucible control device 14 from the microcomputer 16, by which the vapor- deposition condition is controlled. |
