| 摘要 |
PURPOSE:To improve the production efficiency, by vapor-depositing a magnetic material in moving a substrate to be vapor-deposited, in the rotating shaft direction in rotating said substrate. CONSTITUTION:To a rotating shaft 4 rotated by a motor 6 in a vacuum tank 1, a disk substrate 3 is installed from a supplier 5, subsequently, the disk substrate 3 is moved in parallel to an acceptor as the rotating shaft rotates, and simultaneously, a ferromagnetic metal such as Co, etc. is vapor-deposited at a specified incident angle from an evaporation source 9 through a mask 10, so that the easy magnetizing axial direction is oriented in the circumferential direction of the substrate. |
