发明名称 MANUFACTURING DEVICE FOR SEMICONDUCTOR
摘要 PURPOSE:To recognize a position with high dimension accuracy and in a full automatic shape by juxtaposing an automatic recognizer and a preparatory positioning device, preparatorily positioning a base and recognizing the position by the automatic recognizer. CONSTITUTION:When a base 10 being moved is stopped at the position of bonding, jigs 14, 15 are moved mutually in the approaching direction, and the jig 14 is in contact with one side surface of the base 10 and the inside of the concave section 15a of the jig 15 with corners on the other side surface respectively to hold the base 10. Accordingly, the base 10 is positioned preparatorily by the jigs 14, 15, errors by at least transfer mechanism 11 are eliminated, and a target point formed to the base 10 is set positively into the visual field of the automatic recognizer. The ITV camera of an automatic recognizer projects the target point of the upper surface of the base 10 and recognizes the position, thus automatically recognizing the whole base.
申请公布号 JPS58161333(A) 申请公布日期 1983.09.24
申请号 JP19820042597 申请日期 1982.03.19
申请人 HITACHI SEISAKUSHO KK;HITACHI OUME DENSHI KK 发明人 TAKASHIMA KAZUHISA;OZAWA MASAKAZU;KOMABA HIROICHI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址