| 摘要 |
PURPOSE:To enable analysis high in accuracy and sensitivity, and measurement superior in reproductivity, by using an electrode made of diamond having electrical conductivity formed by ion implantation. CONSTITUTION:An ion implanting device is used, and ions of titanium, argon, fluorine, nitrogen, aluminum, oxygen, zinc, or arsenic are implanted to a diamond sample of 5X4X2tmm. size. Each resistivity of the test samples depends upon an amt. implanted, indifferent of kinds of ions, and when an implanted amt. exceeds (1-3)X10<16>ions/cm<2>, the resistivity becomes almost constant and saturated, and its value is (1-5)X10<-3>ohm.cm, having conductivity. |
