| 摘要 |
PURPOSE:To improve the speed of light response, by forming a compound such as S on a thin film into a photoconductive film. CONSTITUTION:The photoconductive film 2 constituted of CuInX2 (X=S, Se, Te) is formed on an insulating substrate 1. Glass, ceramic, etc. is used as the substrate 1. In case of evaporating the film 2 by a vacuum deposition method, it is preferred to perform co-evaporation by providing the evaporation source of X besides the evaporation source CuInX2. After providing the film 2, the heat treatment for activation of the film 2 is performed. Next, electrode 3 are formed at the both ends of the film 2 by a sputtering method, etc. Ni, Cr, etc. is preferable as the material of the electrodes 3. |
