| 摘要 |
PURPOSE:To raise the utilizing efficiency of an evaporation source, and to improve the productivity, by executing vapor-deposition in irradiating an ion beam to a flying evaporated atom from the oblique direction. CONSTITUTION:Under a vacuum atmosphere, a base film 10 is shifted from a wind-off roll 8 to a wind-up roll 9 through cooling rolls 7, 7', and also a magnetic material such as Fe, etc. is vapor-deposited from an evaporation source 11, irradiating an ion beam from an ion source 12 from a range where an angle made by the base film surface and a normal is 40 deg.-80 deg.. |
