| 摘要 |
PURPOSE:To observe the breakdown behavior of a test chip on a large test equipment, by providing an open end for passing the electron beam formed at one side of a mirror frame and a stress load zig arranged at the end of the test chip in a test chip container. CONSTITUTION:An evacuating port 22 is jointed to a vacuum producing means such as a vacuum pump then said pump is operated. When the interior of a mirror member and a test chip container reaches to such degree of vacuum as the electron beam 3 can be emitted, the electron beam 3 is emitted from an electron gun 2 toward the surface of a test chip 16 then the signal of secondary electron beam or characteristic X-ray reflected from said surface is detected by an electron beam detector or a characteristic X-ray detector 11 to perform the surface observation of the test chip 16. Since the test chip container 14 can be manufactured in accordance to the size of a stress load zig 17 and the test chip 16 for a large tension tester or a fatigue tester, the breakdown behavior of a test chip having practical size can be tracked and observed. |
