发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To prevent the vibration of the capillary of the titled device as well as to perform a junction work at a high speed by a method wherein the level adjustment of the capillary is performed by providing a mechanism, with which a vertical movement can be adjusted, below an X-Y stand. CONSTITUTION:When a fixing screw 45 is loosened and a screw 44 is turned, a block 43 performs a horizontal movement. A block 41 performs a vertical movement by the help of tapers 41a and 43a, a frame main body 31 makes a vertical movement through the intermediary of the X-Y base 30, and the height of the capillary 40 can be adjusted. After the adjustment has been done, the blocks 41 and 43 are fixed to a base block 42 by tightening the screw 45. Thus, no level adjusting mechanism for the capillary 40 is provided in the lever mechanism with which the movement of a capillary driving cam 37 is transmitted and the adjustment of the capillary level is performed by providing level adjusting mechanisms 41-45 located under the X-Y base 30, and therefore, no vibration is generated on the capillary, thereby enabling to perform a high-speed junction work. Also, as the distance between the lower end of the capillary and the torch electrode can be made constant, the readjustment of the level of the torch electrode is unnecessitated.
申请公布号 JPS58158933(A) 申请公布日期 1983.09.21
申请号 JP19820040823 申请日期 1982.03.17
申请人 SHINKAWA:KK 发明人 USHIKI HIROSHI;KADOSAWA MOTOAKI
分类号 H01L21/60 主分类号 H01L21/60
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