| 摘要 |
PURPOSE:To make marking easy and reliable by a method wherein chemical substance is made adherent to the surface of defective elements. CONSTITUTION:A probe 5 is brought into contact with Al electrode 3 on Si substrate 1 to inspect the characteristics and then dilute fluoric acid is adhered to element on Al2O3 film 4 using an injector needle 7. After inspection, the substrate 1 is washed with fresh water. The discrimination between acceptable and defective semiconductor elements which is hardly performed by the conventional needle scratching method may be made extremely easy and reliable since Al2O3 may be etched by fluoric acid. |
