摘要 |
PURPOSE:To obtain a stamper which is durable to many-time use while improving its surface hardness, by coating surfaces of a master stamper and a dome stamper with nitrified films of aluminum or chromium. CONSTITUTION:The surfaces of the master stamper and dome stamper used as original disks for plastic molding are coated with nitrides of aluminum or chromium such as AlN, CrN, and Cr3N2, and their hardness is increased to improve their durability. For the formation of them, the stampers formed by Ni electroforming are defatted and dried, and then Al or Cr is vapor-deposited and annealed. Then, the stampers are put in a nitrifying chamber and while gaseous NH3 is fed, they are heated to produce nitrides. |