| 摘要 |
PURPOSE:To prevent noise obstacle acted on an electrode by a heater, by providing a metal layer earthed between the electrode provided to a gas sensor and the heater. CONSTITUTION:A heater 4 is provided on the upper surface of an insulating substrate 1 and an insulating layer 6' is provided thereon so as to cover said heater 4. On this insulating layer 6', an earthed metal layer 5 is provided and, on this metal layer 5, an insulating layer 6 is provided. In addition, electrodes 2, 2' and a gas sensor 3 bridging between these electrodes 2, 2' are provided on the insulating layer 6. By this constitution, the space between the electrodes 2, 2' and the heater 4 is electrically blocked by the metal layer 5 and induction noise to the electrodes 2, 2' due to the heater 4 is prevented. |
