| 发明名称 |
Positive radiation sensitive resist terpolymer from omega alkynoic acid |
| 摘要 |
This invention relates to novel terpolymers of 3-methylcyclopentene, an omega alkynoic acid and sulfur dioxide. Positive radiation sensitive films prepared from the subject terpolymers adhere well to the substrate, demonstrate resistance to cracking and erosion during development and possess excellent edge definition.
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| 申请公布号 |
US4405776(A) |
申请公布日期 |
1983.09.20 |
| 申请号 |
US19820396663 |
申请日期 |
1982.07.09 |
| 申请人 |
RCA CORPORATION |
发明人 |
PAMPALONE, THOMAS R.;KILICHOWSKI, KURT B. |
| 分类号 |
C08G75/22;G03F7/039;(IPC1-7):C08G75/22 |
主分类号 |
C08G75/22 |
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