| 摘要 |
PURPOSE:To simplify the structure, to reduce the power consumption, to facilitate the operability, and to improve the beam intensity by adding a spatter electrode and a control electrode to a discharge device so as to control the discharge and to increase the spatter quantity of a spatter electrode material. CONSTITUTION:A through hole 16 is bored through the first cathode 13 and a spatter electrode 17 pierces this through hole 16 and extends patially through an anode hollow section 12 coaxially in essence, and its surface near the end of the anode hollow section 12 is formed with an ion material. A magnetic field in parallel with the axis of the anode hollow section 12 is applied to it by a magnetic field generator 18. In addition, a through hole 19 is bored through the second cathode 14 so that its axis is coincided with that of the anode hollow section 12. Furthermore, a through hole 20 other than the through hole 16 is bored through the first cathode 13,and partially pierces the anode hollow section 12 and a control electrode 21 extends in parallel with the spatter electrode 17. |
