| 摘要 |
PURPOSE:To form a protective film composed of a deflective conductor and to cause it to firmly stick to a surface by a method wherein a ring-shaped positively-charged mesh or the like is installed as an electrode facing the vapor exit of an evaporation source in a film-forming system wherein atoms are ionized by a glow discharge before they are applied to a substrate for the formation of a film. CONSTITUTION:Al as an evaporation source 2 located in a vacuum processing chamber 1 containing 5X10<-4>Torr O2 atmosphere is melt under an electron beam. A -800V DC overlapped by a 10V/100A AC is applied to a substrate 1 and an approximately 600V DC is applied to an electrode 5. In such conditions, a glow discharge is produced irrespective of being in the high vacuum and the discharge ionizes the Al atoms evaporating from the source 2. The ionized Al atoms impinge upon the negatively-charged surface of a substrate 3 to form a film of AlO2. |
