| 摘要 |
PURPOSE:To lower electrical resistance of an interface and to give linearity up to a high oxygen concn. region to enhance analytical accuracy, by forming an electrode on each side of the main body of an oxygen ion-permeable solid electrolyte element, and a mixed layer of a metal for constituting said electrode and silver on the interface between the electrode and the main body. CONSTITUTION:A mixed layer 2a of silver, and a metal or alloy is formed by sputtering silver together with at least one among Pt, Rh, Ir, Pd, and an alloy of them at the same time on the surface of the main body 1 of an oxygen ion permeable solid electrolyte made of ZrO2-Y2O3 or the like on the cathode side 2, as shown in the magnified figure. The layer 2a contains silver as independent grains as shown by black points, but they do not hinder permeation of oxygen. An anode 3 is likewise formed in 2 layers. Lead wires 6 are connected and the electrodes 2, 3 are covered with porous membranes 4, 5 to form an oxygen concn. sensor element S, thus improving contact between the main body 1 and the electrodes 2, 3, lowering electrical resistance of the interfaces, and permitting analysis having good linearity up to a high oxygen concn. region. |
