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发明名称
METHOD OF FORMING NATURALLY PRODUCED OXIDE LAYER AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS58155725(A)
申请公布日期
1983.09.16
申请号
JP19820205925
申请日期
1982.11.24
申请人
HUGHES AIRCRAFT CO
发明人
JIYON DABURIYU PIITAAZU
分类号
H01L21/316;H01L21/473
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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