| 摘要 |
PURPOSE:To enable the taking of several pieces of information with a single light guide by separately and discretely detecting lights as guided therewith after generated from two types of scintillator materials varied in the emission spectrum with which a scintilltor is painted. CONSTITUTION:A scintillator 9 which is applied on the surface of a light guide 7 facing a sample is divided into two in rough symmetry sanwiching an electron beam passage port 8 as indicated by 9A and 9B and painted with scintillator materials varied in the emission spectrum. As with the irradiation of electron beams, reflected electrons emitted from the surface of a sample enter the scintillators 9A and 9B, lights LA and LB corresponding to the emission spectrums are generated from the scintillators 9A and 9B. They enter a spectroscope 10 transmitted through a common light guide 7 and separated with development as spectrum to be detected separately with photomultiplier tubes 11A and 11B. Outputs ZA and ZB obtained from the photomultiplier tubes which are such reflected electrons as released in different directions from a point of irradiating electron beam on the sample and trapped separately are transmitted to a processing circuit 13 to determine a sum signal or a differential signal therebetween by addition or subtraction processing and the signals thus obtained are sent to a display 14, on the screen of which a formed image or a concave and convex image of the sample are indicated. |
