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发明名称
SEKUNDAERELEKTRONEN-SPEKTROMETER UND VERFAHREN ZU SEINEM BETRIEB
摘要
申请公布号
DE3206309(A1)
申请公布日期
1983.09.15
申请号
DE19823206309
申请日期
1982.02.22
申请人
SIEMENS AG
发明人
LISCHKE,BURKHARD,PROF.DR.-ING.;PLIES,ERICH,DR.RER.NAT.;SCHMITT,REINHOLD,DIPL.-ING.;FROSIEN,JUERGEN,DR.-ING.
分类号
G01R19/155;G01R31/302;G01T1/36;H01J37/05;H01J37/244;H01J37/26;(IPC1-7):G01T1/28;H01J49/44;G01R19/00;G01R31/26
主分类号
G01R19/155
代理机构
代理人
主权项
地址
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