| 摘要 |
PURPOSE:To securely fix a ceramic surface plate with the deformation of an elastic ring by securely clamping it taper fitted with a holder ring through the elastic ring in an apparatus for fixing a ceramic surface plate used for a polishing process of a semiconductor wafer. CONSTITUTION:A ceramic surface plate 10 is chamfered on the entire circumferential surface to form a tapered retaining section 11 thereon. A rubber ring 12 is fitted onto the circumferential surface of the tapered retaining section 11 and a holder ring 13 with a tapered inner circumferential surface is fixed with a bolt 15 through a rubber ring 12. |
