| 摘要 |
PURPOSE:To decrease heat conduction to the outer circumferential part of a substrate and to heat effectively and uniformly a gas sensitive body by a heating element and also, to prolong the life of the heating element, by providing two notched parts to the substrate as a heat insulating domain and providing the gas sensitive body and heating element to the substrate domain sandwiched between two notched parts. CONSTITUTION:A heat-resistant and electrically insulating flat plate-shaped substrate 31 e.g. made of alumina is provided with two notched parts 34, 35 as a heat insulating domain, and a gas sensitive body 32 e.g. an oxide semiconductor, etc. is provided in the domain sandwiched between these parts 34, 35. Further, a heater 33 consisting of e.g. RuO2 paste or metallic paste is provided on the back side of the body 32 through the substrate 31. Moreover, the heater 33 is provided with electrodes 38, 39, and the body 32 is provided with electrodes 36, 37. The heat conductivity to the outer circumferential part of the substrate 31 out of the domain including the body 32 and the heater 33 is decreased because the heat insulating domain consisting of the parts 34, 35 is provided in the substrate 31. |
