| 摘要 |
PURPOSE:To obtain a resonator provided with reflecting lattice excellent in size and its accuracy, by forming the reflecting lattice by the etching and forming a common electrode for its end by the masking vapor deposition or the conductor paste print. CONSTITUTION:After a metallic film 12 is coated on a piezoelectric substrate 11 with the vapor deposition, a photoresist film 13 is coated. The film 13 is applied with the patterning and developed, then unnecessary parts are etched to form an exciting electrode 14 of inter-digital form and a number of reflecting latices 15. Since the lattice 15 has no common electrode, the flow of etching liquid for an etching eliminating section 18 is improved, allowing to obtain accurate shape and size of the side wall in longitudinal direction. Common electrodes 161, 162 are formed with the masking vapor deposition and the print of conductive paste to complete the reflecting electrodes 17. |
