DEVICE FOR TESTING DEFECT OF REGULAR PATTERN

摘要

PURPOSE:To discriminate normal defects from edge parts when plural defects are continuously generated in a controlling device by programming the controlling device so as to regard all the defects as the edge parts of a regulated pattern and to remove the defects from real defects. CONSTITUTION:In a device for detecting the defects of shapes in the regular pattern of a unit opening by using a method for filtering the space frequency of laser light diffraction pattern, the light 20 reflected from a shaped defect part and made incident to a photodetector array 11 is converted into an electric signal and the converted signal is detected in parallel by a multi-detection circuit 21 and outputted as a binary-coded signal indicating the existence of the shaped defect. Receiving a writing signal from a writing signal generating circuit 23, a storage device 22 stored the information of the defect existing at that moment. The controlling device 24 reads out the information of defect stored in the storage device 22 and judges the continuity of the X and Y directions to remove the defect information due to the irregularly shaped opening at the edge parts of the regular pattern and extracts a real defect other than that of the edge parts.