| 摘要 |
PURPOSE:To improve production speed, sensitivity and mechanical strength by laminating amorphous hydrogenated silicon layers separately in functions by each of components such as SiH or SiH2. CONSTITUTION:In an electrophotographic receptor provided with amorphous hydrogenated silicon photoconductive layers on a conductive substrate 1, an amorphous hydrogenated silicon layer 2 consisting essentially of SiH and an amorphous hydrogenated silicon layer 3 consisting essentially of SiH2 are formed as two layers of the amorphous hydrogenated silicon photoconductive layers which are separated in functions. Then, the speed of forming the film for the layers consisting essentially of SiH or SiH2 alone can be increased by setting the decomposing conditions for SiH4; therefore, the electrophotographic receptor which has high production speed, high sensitivity and high mechanical strength, has excellent resistance to abrasion, is safe and has no possibility of pollution is obtained. |
