| 摘要 |
PURPOSE:To detect the machining point with CO2 lasers exactly, by superposing He-Ne laser beams and CO2 lasers by the use of >=2 sheets or reflecting mirrors. CONSTITUTION:CO2 lasers 20, 21, 22 for machining pass between the 1st and the 2nd reflection mirror 8 and 9 without shining on the reflection mirror. The beam 20 of the central axis passes in parallel through the intermediate of the He-Ne beams 11 and 12 reflected by the mirror 8 and the He-Ne beam 10 reflected by the mirror 9 so that the He-Ne lasers can be superposed on the CO2 lasers. The superposed beams 10, 11, 12 and the beams 20, 21, 22 are reflected by a common plane reflection mirror 31, and are irradiated onto the work 4 by a condenser lens 32. It is possible to dispose the focus 50 exactly on the work surface 4 by calculating the deviation of the beam focus of the CO2 lasers from the surface. |
