| 摘要 |
PURPOSE:To completely automate the inspection of a mask substrate by moving by a supporting member drive unit a mask substrate supporting member in parallel with the surface of the substrate, positioning it and analyzing an image signal of a TV camera, thereby obtaining inspection data. CONSTITUTION:A supporting member 1 supports a mask substrate B, and is moved in two directions such as a lateral direction parallel to the surface of the substrate B and a direction perpendicular to the surface of this paper. A supporting member drive unit 4 is engaged with the member 1, and the unit 4 is controlled by a drive controller 5 such as an NC unit. A light emitting unit 6 is disposed obliquely laterally of the member 1, a TV camera 7 is disposed toward the incident point P of the parallel light beam, and controlled by a camera controller 8. The controllers 8, 5 are connected to a main controller 9, which is controlled in the prescribed sequence. The controller 9 also has functions of analyzing the inspection data and the input data, and a television receiver 12, an input unit 13 and an output unit 14 are connected. In this manner, the surface of the mask substrate can be completely automatically inspected. |
