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发明名称
WAFER SUPPORTING DEVICE AND METHOD OF OPERATING SAME
摘要
申请公布号
JPS58153335(A)
申请公布日期
1983.09.12
申请号
JP19830022233
申请日期
1983.02.15
申请人
EATON CORP
发明人
JIYON ZAYATSUKU
分类号
H01L21/302;C30B33/00;C30B35/00;H01L21/3065;H01L21/683
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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