| 摘要 |
PURPOSE:To shorten the drawing time of an electron beam by dividing a figure having sides not parallel to the side of a rectangular electron beam into rectangles, scanning it with large rectangular beam, and dividing the periphery into triangular figures, and scanning the side with the finely shaped rectangular beam. CONSTITUTION:Perpendicular two sides x, y of a figure 2 are equally divided into four parts, and divided into 4 triangular shapes 3 having sides less than 12.5mum of the maximum side of the rectangular electron beam and 6 rectangles 7. In case of x=y=50mum, the rectangles 7 are emitted once by a beam of 12.5mum wide, and each shape 3 is emitted 10<3> times by a rectangular beam 5 shaped in a width 4 of 0.5mum at a pitch 6 of 1/10 of the width 4. However, the emitting time is set to 1/10 of the case of the rectangle 7. According to this method, the required time of drawing the triangular shape can be largely shortened, and the dimensional accuracy of drawing is not lowered. |
