| 摘要 |
PURPOSE:To increase the thickness of an upper magnetic layer and to improve precision, by laminating thin films of magnetic materials. CONSTITUTION:On a surface of a nonmagnetic material substrate 1, a lower magnetic layer 2 is formed by vapor deposition, etc. Then, an insulating layer 5 of SiO, etc., is adhered thereupon, and coil conductors 4 and insulating layers are laminated alternately thereupon by vapor deposition, etc. Then, the 1st thin film 31 of a magnetic material is vapor-deposited over the entire surface of the substrate 1. The 1st thin film 31 is covered with a metallic mask 7 having an opening 6 in a smaller pattern than the thin film 31 and through this opening 6, the 2nd thin film 32 of a magnetic material is vapor-deposited. Thus, the upper magnetic layer 3 consisting of the laminated thin films 31 and 32 is formed. A head is completed by cutting the substrate as shown by an arrow and polishing the tip. |
