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发明名称
摘要
申请公布号
JPS5840527(Y2)
申请公布日期
1983.09.12
申请号
JP19780178861U
申请日期
1978.12.25
申请人
发明人
分类号
G01N23/225;H01J37/07;H01J37/252;(IPC1-7):H01J37/252
主分类号
G01N23/225
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代理人
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