| 摘要 |
PURPOSE:To perform the rapid and accurate work of pulse annealing a workpiece to be treated, by moving the workpiece to be treated between a plurality of heating and cooling zones at a high speed, and controlling the position of the workpiece to be treated by detection using a sensor for detecting the position. CONSTITUTION:A workpiece to be treated is attached to a supporting member 16, charged in a waiting site 1, supported under a hollowed condition by a movable jig 17 and then subjected to substituting treatment by the introduction of atmospheric gas. The movable jig 17 is then lowered to attach the supporting member 16 to a movable stand 15. According to a program, the driving rod 19 of a feeder 18 is operated at a preset speed to let the movable stand 15 and a top head 14 run through a guide rail 13 for successively feeding the workpiece to be treated to heating sites 5, 6 and then a cooling site 8. If the workpiece to be treated does not stop at a predetermined position, its position is detected by any one of position sensors 20a-20h, a signal is dispatched to CPU21, the operational amount of the driving rod 19 is dispatched to the feeder 18 by an arithmetic controller 22, and the top head 14 is moved to correct said position. |
