| 摘要 |
PURPOSE:The titled treating apparatus, having a DC power source for applying a DC voltage to a plastic film to be treated in treating the plastic film with a plasma by the electric discharge, and capable of treating a wide area without deteriorating the electrical characteristics, strength and chemical resistance. CONSTITUTION:In a plasmatic treating apparatus for treating a plastic film having a plasma generating system 1 having a microwave generator tube 9, a waveguide 10 for transmitting the microwaves connected to the microwave generator tube 9 and an electric discharge tube 11 for generating a plasma passed through the waveguide 10 and a film treating system 2 having a treating vessel 20 constituting a treating chamber 19 through a water cooling apparatus 16 placed therebetween, a film to be treated is treated with active species in the plasma between a delivery rotating mechanism 25 and a winding rotating mechanism 26 while applied with a DC voltage from a DC power source 70 through supply electric wires 71, supply terminal 69 and plate electrodes 68 to give the aimed treated film. |
