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发明名称
摘要
申请公布号
JPS58133931(U)
申请公布日期
1983.09.09
申请号
JP19820029688U
申请日期
1982.03.04
申请人
发明人
分类号
H01L21/673;H01L21/02;H05K5/06;(IPC1-7):H01L21/02
主分类号
H01L21/673
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