| 摘要 |
PURPOSE:To make it possible to detect the degree of damage in the inside, by arranging a conductor member in a region, on which ions are projected, in the inside of a vacuum container, and measuring the resistance value of the member at the outside. CONSTITUTION:A conductor member 2 is arranged in the vicinity of the side A in the direction of ion projection. Both ends of the conductor member 2 are connected to the ends of lead wires 3 and 4. The other ends of the lead wires 3 and 4 are guided to the outside of a vacuum container 1. A resistance measuring device 5 is connected between the other ends of the lead wires 3 and 4. The conductor members 2 comprise strip shaped conductors 2a-2c. The intermediate parts of the conductors are closely contacted with insulating parts 6c. The one-end parts of the lead wires 3 and 4 are connected to terminal parts 6a and 6b. The other terminals, which are guided to the outside, are connected to the resistance measuring device 5. When ions are projected on the conductor member 2, the cross sectional area thereof is reduced by sputtering and finally broken. As the ions are projected and the inner wall of the vacuum container 1 is damaged, the cross sectional area of the conductor member 2 is reduced. The degree of the damage of the inner wall of the vacuum container 1 can be detected by measuring the resistance value of the conductor member 2 and observing the change.
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