| 摘要 |
PURPOSE:To obtain a photoconductive material stabilized in electrical and optical properties, not causing deterioration even after repeated uses, and enhanced in durability and moisture resistance, by laminating specified layers composed of amorphous silicon (a-Si). CONSTITUTION:A photoconductive material 100 is formed by laminating on a substrate 101 an amorphous auxiliary layer 102 composed of a-Si contg. N and the first amorphous layer 102 composed of a-Si having the first layer region 104 composed of a-Si contg. O and the second layer region 105 composed of a-Si contg. an element of group V, such as P or As, both located on the side of the substrate 101, and satisfying the shown equation and inequality, where tB is thickness of the region 105, and T is the difference between thickness of the layer 103 and tB, and further, a second amorphous layer composed of C and halogen. |
