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发明名称
Manufacture of semiconductor devices
摘要
申请公布号
US2842831(A)
申请公布日期
1958.07.15
申请号
US19560607084
申请日期
1956.08.30
申请人
BELL TELEPHONE LABORATORIES, INCORPORATED
发明人
PFANN WILLIAM G.
分类号
C23C14/04;H01L21/00;H01L21/24
主分类号
C23C14/04
代理机构
代理人
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