| 摘要 |
PURPOSE:To simultaneously conduct a film-forming step and a pattern-producing step and obtain an inexpensive recording head, by a method wherein electrodes are constituted of the first layer and the second layer of specified materials, and a temperature sensor is formed of the same material as that for the first layer. CONSTITUTION:A sputtered film is produced as a heating resistor on a substrate, and after a stabilizing treatment, heating resistor dots 1 are provided in a desired pattern. Thereafter, either of Ti, Fe, Co is vapor-deposited on the entire surface by a vapor depositing device to produce the first layer, and the second layer consisting of either of Al, Cu, Au is provided contiguously with the first layer by vapor deposition. Then, a common electrode 2, individual electrodes 3, a temperature sensor part 4 and temperature sensor electrodes 5 are provided in desired patterns by a photolithographic process. To eliminate Al or the like remaining at the temperature sensor part 4, the parts other than the sensor part 4 are covered again by a photoresist, followed by etching. Finally, SiC is applied as a surface protective layer by sputter coating. |
