| 摘要 |
PURPOSE:To inspect width irrespective of a pattern direction by judging fault only from the number of intersecting points with pattern through the scanning of a circular mask with a point on the pattern periphery as its center. CONSTITUTION:A binarized image 3 is formed by scanning a pattern to be inspected with a photo-electric converting scanner and by reading it, and it is then scanned by a detection mask 1, detecting the periphery thereof. A circular mask obtained from the designed reference value centering around the point for which the periphery is detected. When a pattern width satisfies the designed reference, it is considered to be sure that there are two intersecting points 4 detected by the scanning. If more intersecting points are found, it means that the width exceeds the designed reference value, which should be considered as a fault. According to this method, a pattern oriented to any direction can be detected. A number of intersecting points between a circular mask and pattern can be calculated at a high speed by inputting data X on the circular mask, obtaining exclusive OR's 7 of adjacent two points and by adding such outputs 8. |
