| 摘要 |
PURPOSE:To obtain a film in the uniform thickness at the external circumference of a cylindrical sample by grow discharge by providing an auxiliary tube of the same diameter as the sample being arranged in the state to be closely attached to the sample coaxially. CONSTITUTION:An auxiliary tube 7 provided at the lower end has the same outer diameter as a sample 6. The outer circumference of upper portion of such tube is cut and is inserted into the sample 6, thereby working as a fixing base. The upper end of auxiliary tube provided at the upper portion is sealed and it is also used as an upper cover of sample 6 preventing entrance of reaction gas into said sample. Moreover, it has the same outer diameter as the sample 6 and is inserted thereto through the cutting of the circumference of the lower end. Thereby, the sample 6 and auxiliary tubes 7, 8 are integrated without stepped portions and gaps. When a thin film is formed on the circumference of the sample 6 through the glow discharge by introducing the gas 3 into the reaction chamber 1, the gas flow is not disturbed and the field becomes uniform since there exist no stepped portion and gap. Accordingly, a thin film having extremely uniform thickness can be formed and abnormal thickness at both ends of the sample 6 does not exist. |
