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发明名称
VERFAHREN ZUR OBERFLAECHENBEHANDLUNG VON HALBLEITERSCHEIBEN, VORZUGSWEISE VOR DEM EPITAXIEPROZESS
摘要
申请公布号
DD202222(A1)
申请公布日期
1983.08.31
申请号
DD19790216099
申请日期
1979.10.09
申请人
DEHMLOW,RONALD,DD;HEIDBORN,PETER,DD;KIRSTEIN,WOLFGANG,DD;KRAUSE,RAINER,DD;MUELLER,WOLFGANG,DD
发明人
DEHMLOW,RONALD,DD;HEIDBORN,PETER,DD;KIRSTEIN,WOLFGANG,DD;KRAUSE,RAINER,DD;MUELLER,WOLFGANG,DD
分类号
H01L21/30;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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