METHOD OF MAKING AN ELECTRON RESIST PATTERN,申请号EP19820302966-传众专利搜索

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发明名称	METHOD OF MAKING AN ELECTRON RESIST PATTERN
摘要
申请公布号	EP0068675(A3)	申请公布日期	1983.08.31
申请号	EP19820302966	申请日期	1982.06.09
申请人	HONEYWELL INC.	发明人	LAI, JUEY H.
分类号	G03F7/36;C08F2/00;C08F291/00;G03F7/033;G03F7/038;G03F7/095;G03F7/11;G03F7/26;G03F7/38;H01L21/027;(IPC1-7):G03F7/26	主分类号	G03F7/36
代理机构		代理人
主权项
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