发明名称 |
Stripping compositions and methods of stripping resists |
摘要 |
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a dialkyl sulfone compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
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申请公布号 |
US4401747(A) |
申请公布日期 |
1983.08.30 |
申请号 |
US19820413996 |
申请日期 |
1982.09.02 |
申请人 |
J. T. BAKER CHEMICAL COMPANY |
发明人 |
WARD, JR., IRL E.;HALLQUIST, LISA G.;HURLEY, THOMAS J. |
分类号 |
C23F1/44;G03F7/42;(IPC1-7):G03C5/00;B08B7/00;B01F1/00;C09D9/00 |
主分类号 |
C23F1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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