| 摘要 |
PURPOSE:When the weight standard signals of a single crystal being pulled up are sent in the range from the shoulder to the body, the differentiated values to time are set so that they become continuous to form a single crystal with a continuous shape from the shoulder to the body. CONSTITUTION:The weight of the pulled-up single crystal 3 is detected with the weight detector 5 and the heater 8 is controlled so that the detected weight coincides with the standard weight signals from the standard weight signal generator 6. In the production of single crystals according to the Chokralsky method in such a manner, the above standard weight signals are set so that their differentiated values to time becomes continuous from the shoulder to the body of the single crystal 3 to control the heating device 8 for heater 4. |
