| 摘要 |
PURPOSE:To enable the automation of a series of work without the aid of man by providing a means of retrieving the information indicating production stages consisting of the combinations of the light transmitting parts and non-transmitting parts provided in part of mask for production of semiconductor devices. CONSTITUTION:A prescribed exposure pattern 2' consisting of bright parts and dark parts is formed on glass 1' of a glass mask for manufacture of semiconductor devices. Characters and figures indicating the names of products, the names of stages and the lots of masks are printed on the peripheral parts of said masks with alphabets or the like, and are checked by human eye in the prior art. If the information heretofore expressed with the figures and characters is replaced with the simple repetitive patterns of bright and dark parts, the mask that provides information automatically by the photodetecting elements for detecting transparence and non-trasparence when exposed is obtained. A series of works are thus automated without the aid of man. |
