| 摘要 |
PURPOSE:To transfer a sheet material without causing the damage, by constituting a transfer jig, which relocates the sheet material of semiconductor thin plates or the like between cartridges, from a stage and slider placing to position the filled cartridge and empty cartridge. CONSTITUTION:This transfer jig suitable for handling a wafer (semiconductor sheet) comprises a stage 1 of box construction and slider 4 both having a sliding part 2 in this stage 1 and protruding an arm 3 onto the stage 1. A filled cartridge placing position 5 and empty cartridge placing position 6 are provided along the forward direction of the arm 3 on the stage 1, and a cartridge 7 is positioned by a positioning pin 10 provided respectively to each position 5, 6. While two guide bars 14 are provided to the inside of the stage 1, and a sliding body 15 of the slider 4 is fitted to said bars, then the slider 4 is slidably controlled by holding a grip 22. |
