| 摘要 |
PURPOSE:To make mounting on working points and working planes easy and to detect positions in a wide range by disposing a scanning signal transmitter which outputs rotating signals and >=3 pieces of scanning signal receivers on the sample plane and processing the received signals of the receivers arithmetically. CONSTITUTION:The rotary scanning signal of an angular speed omega of a rotating signal oscillator P is detected with the receivers D1-D3 fixed in the working plane of the P and the peak values of the output signals thereof are detected in a detection part H and are fed to a scanning angle detection part J. On the other hand, the angular speed signal from an output part K which applies the rotary scanning signal is fed to the part J, by which the vertical angles (angles of circumference) theta12, theta23 of DELTAPD1D2, DELTAPD2D3 are determined from the product of the respective detected time differences DELTA12, DELTA23 and omega. The position of the point P is determined as the intersected point of the circles O12, O23 past the 3 points PD1D2 and PD2D3 in an arithmetic part C, and the position information of the point P is outputted to a position information output part S. The mounting on the working points and working planes is thus easy and the positions in a wide range are detected. |
