| 摘要 |
PURPOSE:To improve the perpendicular orientation property of a vertically magnetized layer associated to high density recording remarkably in a magnetic recording medium formed successively with magnetic recording layers consisting of Co-Cr alloy films by forming resistance magnetic force layer of thin alloy films of Co and TA consisting essentially of Co and forming the two layered film medium consisting of the resistance magnetic force layer and the magnetic recording layer by a sputtering method using opposed targets. CONSTITUTION:Co-Ta alloy films are composed preferably of >=50at% Co, and further of about the same concn. (at at.%) of Co in the vertically magnetized layer. More particularly, if Ta is contained at >=15wt% (weight per cent) concn., the coercive force thereof decreases abd the vertical orientation property sufficient for practical use is realized. If the Co-Ta alloy films are further formed of amorphous alloys, the vertically magnetized layer having extremely good orientation property is obtained. A substrate 40 in a sputtering system of opposed target type is disposed on the sides of a pair of opposed targets T1, T2, and a magnetic field is applied between the targets so that desired films are formed on the substrate 40 by sputtering. The sputtering at a high speed and low temp. is thus made possible.
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