| 摘要 |
PURPOSE:To improve the precision and sensitivity of measurement nearly at specific temperature by coating the outer edge of a lower unit with a glass layer and an upper unit with a glass adhesive and then mounting a piezoeresistance element, and carrying out vacuum heating and cooling under pressure while superposing both units. CONSTITUTION:The outer edge of the lower unit 2 is coated with the glass layer 8. The upper unit 1 is coated with paste of glass powder at a prescribed top surface position and the piezoresistance element 7 is mounted thereupon. On the lower unit 2, the upper unit 1 is superposed and in a furnace, they are heated under a vacuum to fuse the glass layer 8. Then, 400g/cm<2> gas is introduced into the furnace to strain the upper unit 1. At this time, the space 3 in the furnace is held under a vacuum by the sealing operation of the glass layer 8 and the element 7 has no strain because the glass layer 9 is in the fused state. In this state, cooling is performed and wiring, etc., are carried out to obtain the absolute pressure transducer which has high sensitivity and high precision nearly at 400g/cm<2> abolute pressure. |
