| 摘要 |
PURPOSE:To make it possible to expedite the diagnosis of abnormalities in vibrations, attachments, and the like and to improve quality, by providing a vibration sensor and a temperature sensor at a final vibrating part of an ultrasonic wave horn, and detecting the vibrating state. CONSTITUTION:The vibration sensor 9, which is made of a piezoelectric element and detects the vibrating state, is attached to a chip 8 in the direction of a vibrating axis. The sensor 9 is connected to a positive input of an amplifier circuit 10. The vibrating state is monitored by a sensor monitor 11. The chip 8 is attached so that the temperature sensor 12 is attached in the direction of an nonvibrating axis, or a temperature detecting gage whose resistance is varied with heat is used. The sensor 12 is connected to a negative input of the amplifier circuit 10. The temperature is monitored by the monitor 11. |
